代表论文
 
Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane Seong Ju Wi, Yong Ju Jang, Dong Gi Lee, Seon Yong Kim, and Jinho Ahn Membranes 2022.12.21

Near-field infrared nanoscopic study of EUV-and e-beam-exposed hydrogen silsesquioxane photoresist Jiho Kim, Jin-Kyun Lee, Boknam Chae, Jinho Ahn and Sangsul Lee Nano
Convergence 2022.12.02

Effect of wrinkles on extreme ultraviolet pellicle reflectivity and local critical dimension Dong Gi Lee, Young Woong Kim, Seungchan Moon, and Jinho Ahn Applied Optics 2022.07.05
 
Atomic layer etching of SiO2 using trifluoroiodomethane Seon Yong Kim, In-Sung Park, and Jinho Ahn Applied Surface Science 2022.07.01
 
Actinic patterned mask imaging using extreme ultraviolet ptychography microscope with high harmonic generation source  Young Woong Kim, Dong Gi Lee, Seungchan Moon, Chang Mo Ku, Joong Hwee Cho and Jinho Ahn Applied Physics Express 2022.06.17
 
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